Testing Temperature Uniformity Across a Wafer Heater Surface

https://precision-surface-heat.oakmontscope.com/posts/glass-heater-applications-in-optical-and-display-equipment

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result