How Cutouts, Edges, and Openings Affect a Wafer Heater Layout

https://surface-heater-insights.hexaforgey.com/posts/ito-glass-heater-technology-explained-for-engineers-and-designers

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result