A Practical OEM Checklist for Specifying a Wafer Heater

https://precision-surface-heat.wpsuo.com/wafer-heater-applications-across-semiconductor-processing-stages

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result